JPS5845477U - 流体制御装置 - Google Patents

流体制御装置

Info

Publication number
JPS5845477U
JPS5845477U JP14078981U JP14078981U JPS5845477U JP S5845477 U JPS5845477 U JP S5845477U JP 14078981 U JP14078981 U JP 14078981U JP 14078981 U JP14078981 U JP 14078981U JP S5845477 U JPS5845477 U JP S5845477U
Authority
JP
Japan
Prior art keywords
chamber
valve
control device
fluid control
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14078981U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113894Y2 (en]
Inventor
進　善一
Original Assignee
エヌオーケー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エヌオーケー株式会社 filed Critical エヌオーケー株式会社
Priority to JP14078981U priority Critical patent/JPS5845477U/ja
Publication of JPS5845477U publication Critical patent/JPS5845477U/ja
Application granted granted Critical
Publication of JPH0113894Y2 publication Critical patent/JPH0113894Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exhaust-Gas Circulating Devices (AREA)
  • Fluid-Driven Valves (AREA)
  • Fluid-Pressure Circuits (AREA)
JP14078981U 1981-09-21 1981-09-21 流体制御装置 Granted JPS5845477U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14078981U JPS5845477U (ja) 1981-09-21 1981-09-21 流体制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14078981U JPS5845477U (ja) 1981-09-21 1981-09-21 流体制御装置

Publications (2)

Publication Number Publication Date
JPS5845477U true JPS5845477U (ja) 1983-03-26
JPH0113894Y2 JPH0113894Y2 (en]) 1989-04-24

Family

ID=29933932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14078981U Granted JPS5845477U (ja) 1981-09-21 1981-09-21 流体制御装置

Country Status (1)

Country Link
JP (1) JPS5845477U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51109520A (ja) * 1975-03-24 1976-09-28 Hitachi Ltd Kitaishindoben

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51109520A (ja) * 1975-03-24 1976-09-28 Hitachi Ltd Kitaishindoben

Also Published As

Publication number Publication date
JPH0113894Y2 (en]) 1989-04-24

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